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WF6 CAS NO.7783-82-6
- FOB Price: USD: 1.00-2.00 /Metric Ton Get Latest Price
- Min.Order: 5 Metric Ton
- Payment Terms: L/C,T/T
- Available Specifications:
99.99%(1-5)Metric Ton99.99%(5-20)Metric Ton
- Product Details
Keywords
- WF6
- Tungsten hexafluoride
- CAS: 7783-82-6
Quick Details
- ProName: WF6
- CasNo: 7783-82-6
- Molecular Formula: WF6
- Appearance: colorless gas
- Application: tungsten chemical vapor deposition
- DeliveryTime: Within 2 weeks after order confirmatio...
- PackAge: cylinder or as required
- Port: Qingdao Port
- ProductionCapacity: 5000 Metric Ton/Year
- Purity: 99.99%
- Storage: cylinder
- Transportation: By sea
- LimitNum: 5 Metric Ton
- CAS: 7783-82-6
- Molecular Formula: WF6
Superiority
Tungsten(VI) fluoride, also known as tungsten hexafluoride, is an inorganic compound with the formula WF6. It is a toxic, corrosive, colorless gas, with a density of about 13 g/L (roughly 11 times heavier than air. It is one of the heaviest known gases under standard conditions. WF6 is commonly used by the semiconductor industry to form tungsten films, through the process of chemical vapor deposition. This layer serves as a low-resistivity metallic "interconnect".
Tungsten Hexafluoride WF6 GAS
CAS No.: 7783-82-6
EINECS No.: 232-029-1
UN No.: UN2196
Purity: 99.999%
Dot Class: 2.3
Appearance: Colorless
Grade Standard: Electron Grade,Industrial Grade
Details
|
CF4 |
<0.5 ppmV |
B |
≤10 ppbW |
Ti |
≤10 ppbW |
|
O2 |
<0.5 ppmV |
Ca |
≤5 ppbW |
Li |
≤10 ppbW |
|
N2 |
<1 ppmV |
Cd |
≤2 ppbW |
U |
≤0.05 ppbW |
|
CO |
<0.5 ppmV |
Cr |
≤10 ppbW |
Zn |
≤10 ppbW |
|
CO2 |
<0.5 ppmV |
Fe |
≤10 ppbW |
Si |
≤10 ppbW |
|
SIF4 |
<0.5 ppmV |
Other Metal |
≤500 ppbW |
Pb |
≤10 ppbW |
|
SF6 |
<0.5 ppmV |
K |
≤5 ppbW |
P |
≤2 ppbW |
|
HF |
<5 ppmV |
Mn |
≤10 ppbW |
Mg |
≤10 ppbW |
|
Al |
≤10 ppbW |
Na |
≤5 ppbW |
Ni |
≤20 ppbW |
|
As |
≤10 ppbW |
Th |
≤0.1 ppbW |
Cu |
≤5 ppbW |
|
|
|
|
|
Mo |
≤10 ppbW |